Courses related to topics within Advanced Lithography + Patterning

Add a learning opportunity to advance your career and complete your conference experience

Courses at Advanced Lithography + Patterning

SPIE will offer courses in San Jose. Join us for live instruction, meet the instructors, and connect with your peers. Topics include microlithography, stochastic lithography, metrology, EUV lithography, machine learning and more.

Featured instructors from past courses


Qinghuang Lin

Director of Technology Development Center, Lam Research Corp

Ralph Dammel

Research Fellow, EMD Electronics

Chris Mack

Chief Technical Officer, Fractilia

Harry Levinson

Principal Lithographer, HJL Lithography

Watch a course preview


Introduction to Microlithography: Theory, Materials and Processing

Listen to instructors Murrae Bowden (President, Electronic Materials & Processing Consulting) and Ralph Dammel (Technology Fellow, EMD Electronics) as they provide an informative introduction to microlithography.

Discounts and more information and member discounts


15% off for SPIE Regular Members
50% off for SPIE Student Members

For more information:

Contact education@spie.org

Cancellation notification


Courses are subject to cancellation due to insufficient registration or instructor availability. In the event of a cancellation, SPIE will contact attendees via email. 

For more information:

Contact education@spie.org

Frequently asked questions (FAQs) for courses


  • Check-in at registration
  • Receive badge and tickets
  • Go to Course Materials Desk*
  • Scan badge, exchange course ticket(s) for printed course materials* and receive location of course

*As a courtesy to the instructor and other attendees, please arrive to the course no later than the posted start time. Course materials can be picked up any time before the scheduled date and time of your course, but it is a good idea to pick them up at least 15-30 minutes prior.

*Printed course materials will act as a "ticket" to enter the course room. Do not go directly to the classroom without picking up your materials first.

Course room locations are provided onsite when you collect your course materials. Locations vary and courses may be held in a different location than the conferences. We recommend coming to the desk at least 15-30 minutes prior to the start of the class to give yourself time to collect your materials and walk to your classroom.

Yes. Most people collect materials for multiple courses at the same time.

There is a $50 USD service charge for processing refunds. Requests for refunds must be received by 16 February 2023; all registration fees will be forfeited after this date.

Yes, you may register for courses onsite. However, we recommend registering for courses early to ensure a seat. Courses without sufficient registration two weeks prior to the event are subject to cancellation.

There are no wait lists for courses. We recommend registering early to ensure a seat.

Course registrations include a printed copy of the course materials. Some courses may include textbooks. Check the course descriptions for more information.

If a course is cancelled, you will be contacted by SPIE staff via email.

SPIE awards digital badges and certificates to participants who attend courses and complete the evaluation and quiz. Certificates will be sent via email to attendees approximately 8 weeks after the conference has ended.

To receive a digital credential you must:

  • Be present for the entire course
  • Complete course quiz
  • Fill out course evaluation
  • Fill in your contact information in the space provided
  • Drop completed quiz and evaluation forms in the Course Evaluation Box in the course room or return to the Course Materials desk

More information about digital credentials can be found at SPIE Badges and Certificates.

No, the in-person courses will not be recorded.

There will not be an option to attend an in-person course virtually.

Some courses are available as pre-recorded, on-demand, online. To see our full list of available online courses and to learn more, visit SPIE Online Courses.