Courses related to topics within Advanced Lithography + Patterning

Add a learning opportunity to advance your career and complete your conference experience

SPIE online courses

Created by experts, SPIE online courses are on demand and designed to be taken on your own schedule from your desktop or mobile device. Registration and associated fees are separate from the On Demand week registration. Online courses are non-refundable.

SPIE Online Courses


The following select online courses align with topics from Advanced Lithography + Patterning 2022 and are open for registration. 

Lithography Integration for Semiconductor FEOL Fabrication (SC992)

Introduction to Microlithography: Chemistry, Theory and Processing (SC101-C)

Practical Photoresist Processing (SC616)

Included with online courses:


  • Immediate access
  • Access for one year from purchase
  • Slideshow presentations
  • Quizzes to test your retention of the material
  • Supplemental resources
  • Digital certificates

Transcription services and closed captioning are being added to our online courses to increase accessibility. Online courses that include these options will be noted in the course description in the Additional Notes section.

Learn more about online courses: Frequently Asked Questions (FAQs) 

Featured instructors from past courses


Qinghuang Lin

Director of Technology Development Center at Lam Research Corp

Ralph Dammel

Research Fellow at EMD Electronics

Chris Mack

Chief Technical Officer, Fractilia

Harry Levinson

Principal Lithographer, HJL Lithography

Discounts and more information and member discounts


15% off for SPIE Regular Members
50% off for SPIE Student Members

For more information:

Contact education@spie.org

For more information:


Questions? Contact education@spie.org