Registration for SPIE Advanced Lithography + Patterning

Find the most up-to-date information about registration details here

Registration is closed; it will re-open in November for the 2024 event

We look forward to seeing you in at SPIE Advanced Lithography + Patterning 2024 in San Jose, California. Stay connected and sign up to be notified of important dates, such as when registration opens.

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Registration fees for 2023 event

All online charges are made in US dollars.

SPIE Member Nonmember
Speaker or author, program committee, session chair $1,020 $1,180
Technical attendee
$1,020 $1,180
Full-time student $585 $1,180
Exhibition visitor $0 $0

What is included with registration for 2023 event

             Full registration  Exhibition visitor
All presentations, plenaries, Welcome Reception and other special events, exhibition
50 proceedings downloads*

Industry sessions

*Paid registrations include proceedings from this event, downloadable from the SPIE Digital Library. SPIE will email details and instructions.


Exhibition visitor registration is free, but you must register.

Course registration information

Courses are priced separately and prices include applicable taxes.

  • Course-only registration includes your selected course(s), course notes, coffee breaks, and admittance to the exhibition
  • Course prices increase $75 after the deadline: 10 February 2023
  • Course prices include applicable taxes
  • Onsite, please go to the course materials pickup after you pick up your badge
  • Allow yourself enough time to register, pick up your materials, and get to your course

SPIE Member, SPIE Student Member, and student pricing

SPIE Members receive conference and course registration discounts. Discounts are applied at the time of registration. Membership can be purchased at the time of event registration.

SPIE Student Members receive a 50% discount on all SPIE courses. Student Membership can be purchased at the time of event registration.

Student authors and presenters may register at the student rate as long as they meet the definition of a student. Grant and scholarship opportunities are available. 

Learn about student grants


Student registration rates are available only to undergraduate and graduate students who are enrolled full time and have not yet received their Ph.D. Post-docs may not register as students. A student ID number or proof of student status is required with your registration.

Press registration

For credentialed press and media representatives only. Please email contact information, title, and organization to

Refund policy

There is a $50 USD service charge for processing refunds for conference or course registrations. Requests for refunds must be received by 16 February 2023; all registration fees will be forfeited after this date. Membership dues, exhibit registration, or special events are not refundable.

US Government credit cards

U.S. Government credit card users: have your purchasing officer contact the credit card company and get prior authorization before attempting to register. Advise your purchasing agent that SPIE is considered a 5968 company for authorization purposes.

Contact SPIE Customer Service

Phone: +1 360 676 3290 or +1 888 504 8171
Fax: +1 360 647 1445

Hours of operation
8:00 am to 5:00 pm Pacific Time, Monday - Friday

Universal Time
1500 - 0100 November - March
1400 - 0000 April - October