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Advanced Lithography + Patterning program

An impressive gathering of conferences, presenters, industry programming, courses, and special events

Building the 2022 program

Each year this important community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues. Be sure to view the six conference topics, submit an abstract, and become part of this amazing program.

The 2022 call for papers is open and the program will be available in the fall.

Experts address a variety of technologies and applications:

  • Extreme ultraviolet (EUV) lithography
  • Novel patterning technologies: semiconductors, MEMS, NEMS, MOEMS
  • Metrology, inspection, and process control for microlithography
  • Advances in patterning materials and processes; optical microlithography
  • Design-process-technology co-optimization for manufacturability
  • Advanced etch technology and process integration for nanopatterning
Lithography in action

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