25 - 29 February 2024
San Jose, California, US

Advanced Lithography + Patterning program

Come to join this impressive lineup of technical presentations, industry events, networking opportunities, and courses

A program of innovation

Each year this important community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues. Six conferences highlight valuable topics important to advancing the semiconductor industry. Special events provide ample time for networking and connecting with experts. Courses extend the learning opportunity with in-person instruction.

View the program using any or all of these tools

Technologies and applications

  • Extreme ultraviolet (EUV) lithography
  • Novel patterning technologies: semiconductors, MEMS, NEMS, MOEMS
  • Metrology, inspection, and process control for microlithography
  • Advances in patterning materials and processes; optical microlithography
  • Design-process-technology co-optimization for manufacturability
  • Advanced etch technology and process integration for nanopatterning

Featured events and career training

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