Advanced Lithography + Patterning program

Make plans to be part of this impressive lineup of technical presentations, industry events, networking opportunities, and courses

A program of innovation

Each year this important community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues. Be sure to browse the six conferences to see which topics will be addressed and highlighted.

Download the SPIE Conference App

View the entire, most current program and exhibition content on your mobile device. Free to download. Update now to the latest version.

Experts address a variety of technologies and applications:

  • Extreme ultraviolet (EUV) lithography
  • Novel patterning technologies: semiconductors, MEMS, NEMS, MOEMS
  • Metrology, inspection, and process control for microlithography
  • Advances in patterning materials and processes; optical microlithography
  • Design-process-technology co-optimization for manufacturability
  • Advanced etch technology and process integration for nanopatterning
Lithography in action creates a rainbow of colors

Featured events and career training

Stay connected

Letter Icon: Sign up for emails Sign up for emails Sign up for emails ...
Mobile Phone Icon: Get the conference app Get the conference app Get the conference app ...