2024 call for papers opens June 2023

Advanced Lithography + Patterning program

Make plans to be part of this impressive lineup of technical presentations, industry events, networking opportunities, and courses

A program of innovation

Each year this important community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues. Six conferences highlight valuable topics important to advancing the semiconductor industry.

Registration includes 50 SPIE Digital Library downloads


Access the research you need

Presentations and manuscripts presented at Advanced Lithography + Patterning are published in the Proceedings of SPIE on the SPIE Digital Library.

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