Advanced Lithography + Patterning program

Make plans to be part of this impressive gathering of conferences, presenters, industry programming, courses, and special events

Building a great program

Each year this important community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues. Be sure to browse the six conferences to see which topics will be addressed and highlighted.

View the 2022 program, and use it as a reference tool as you prepare to submit your research for this year.

Featured sponsor

Experts address a variety of technologies and applications:

  • Extreme ultraviolet (EUV) lithography
  • Novel patterning technologies: semiconductors, MEMS, NEMS, MOEMS
  • Metrology, inspection, and process control for microlithography
  • Advances in patterning materials and processes; optical microlithography
  • Design-process-technology co-optimization for manufacturability
  • Advanced etch technology and process integration for nanopatterning
Lithography in action

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Featured events and career training

Attendees enjoying a networking event at SPIE Advanced Lithography + Patterning

Special events

Sessions feature speakers presentating on a wide range of optical sciences topics. Join colleagues as you learn, connect, and network.

Instructor at one of the onsite courses offered at SPIE Advanced Lithography + Patterning


Take courses on topics that align with lithography, processing, and fabrication. A valuable investment for your career.

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