Plan to attend and hear the latest research at SPIE Advanced Lithography + Patterning in San Jose

Participate in the event focused on optical lithography, metrology, and EUV

Plan to join other leaders eager to learn about emerging technology

Enrich your work by attending the most important conference for optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

Meeting protocols to be aware of


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Vaccination recommended

We strongly recommend all attendees be fully vaccinated or have a negative test result prior to arrival.

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Masks recommended

Wearing masks indoors is strongly recommended but not required.

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Off-site COVID-19 testing

Local testing sites will be available for a fee for travel clearance or other needs.

Additional guidelines

Find other best practices such as washing hands, respecting personal space, and more.

Why participate in Advanced Lithography + Patterning?


Technology demonstrated at SPIE Advanced Lithography + Patterning

Share latest research

Be a part of hundreds of presentations from around the world that will be published in the SPIE Digital Library.

Colleagues network at SPIE Advanced Lithography

Connect with colleagues

Take advantage of various technical and networking events to keep you up to date with research and peers.

Plenary speaker at SPIE Advanced Lithography

Plenary events

World-class speakers share insights on the latest challenges and opportunities from industry and academia.

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