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Make plans to join your colleagues in San Jose

Participate in the event focused on optical lithography, metrology, and EUV

Plan to join other leaders eager to learn about emerging technology

Enrich your work by attending the most important conference for optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

Attendees at SPIE Advanced Lithography

Your health and safety are important

We will be working hard throughout the year to follow health and event-management best practices to ensure a safe and productive opportunity to meet.

SPIE will continue to develop guidelines and share more details in the coming months.

SPIE conference atttendees interact safely by keeping their distance and wearing masks

Why participate in Advanced Lithography + Patterning?


Technology demonstrated at SPIE Advanced Lithography + Patterning

Share latest research

Be a part of hundreds of presentations from around the world that will be published in the SPIE Digital Library.

Colleagues network at SPIE Advanced Lithography

Connect with colleagues

Take advantage of various technical and networking events to keep you up to date with research and peers.

Plenary speaker at SPIE Advanced Lithography

Plenary and keynote events

World-class speakers share insights on the latest challenges and opportunities from industry and academia.

Review past years of Advanced Lithography


Reflecting on the past to prepare for the future

Read information from past events, as we prepare for the 2022 conference.

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