SPIE Advanced Lithography + Patterning

The 2022 call for papers is open: Share your research, challenges, and breakthroughs with colleagues in San Jose

The conference for emerging technology in the semiconductor industry

Submit your abstract and join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

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Present your research at Advanced Lithography + Patterning 2022 in San Jose

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Prepare your abstract

Review everything you need to know about presenting at SPIE Advanced Lithography + Patterning in 2022. With the call for papers open, abstracts are due 1 September 2021.

Presenter at SPIE Advanced Lithography + Patterning

Researchers in the following topics are encouraged to participate

Extreme ultraviolet (EUV) lithography
Novel patterning technologies for semiconductors, MEMS/NEMS and MOEMS
Metrology, inspection, and process control for microlithography

Advances in patterning materials and processes
Optical microlithography
Design-process-technology co-optimization for manufacturability
Advanced etch technology for nanopatterning

Come to hear from experts

H.S. Philip Wong

Department of Electrical Engineering, Standford (USA), presents: Does lithography still matter after high NA EUV?

Luc Van den Hove

President & CEO, imec (Belgium), presents: The power of deeptech: a tale of bits, molecules and ecosystems

Take a closer look

Learn about the technical conferences

Review the six topic areas to see where your research fits best. We welcome your participation.

An image of CPU die: technology advanced at SPIE Advanced Lithography + Patterning

Exhibit at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and to get business done.

Student information, scholarships, and opportunities

Share information for students with your networks

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage and learn about the industry, as well as share their latest research. The best part? Leading companies support student participation by providing scholarships.

Student authors at SPIE Advanced Lithography + Patterning meet and network

Find past proceedings in the SPIE Digital Library

Access the 2021 research and recordings

SPIE Advanced Lithography 2021 conference proceedings papers and presentation recordings are published in the SPIE Digital Library as they become available. All 2021 paid conference registrations included one volume for ongoing access.

Person browses SPIE Proceedings in SPIE Digital Library