Advanced Lithography + Patterning conferences

Topics ranging from optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications

Featuring six conference topics

Hear the latest research at Advanced Lithography + Patterning 2022. We are excited to offer another outstanding program.

Featured sponsor


  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

2022 Symposium Chairs

Kafai Lai

University of Hong Kong (USA)
2022 Symposium Chair

Qinghuang Lin

LAM Research Corp. (USA)
2022 Symposium Co-Chair

Proceedings will be published on the SPIE Digital Library

Paid registration include proceedings

SPIE Advanced Lithography 2022 conference proceedings are published in the SPIE Digital Library. All 2022 paid conference registrations include 50 proceeding downloads with ongoing access through your SPIE account.