Topics range from optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. Come hear the latest research at Advanced Lithography + Patterning. We are excited to offer another outstanding program.
University of Hong Kong (USA)
2023 Symposium Chair
LAM Research Corp. (USA)
2023 Symposium Co-Chair
SPIE Advanced Lithography 2022 conference proceedings are published in the SPIE Digital Library. All paid conference registrations include 50 proceeding downloads with ongoing access through your SPIE account.