2024 call for papers opens June 2023

Advanced Lithography + Patterning conferences

Find the conference topics that interest you most, such as optical and EUV lithography, innovations in patterning technology advancements, and materials and processes related to semiconductor manufacturing

Featuring six conference topics

Topics range from optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. Come hear the latest research at Advanced Lithography + Patterning. We are excited to offer another outstanding program.


  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

The Symposium Chairs invite you to participate in this year's event. 

Read invitation

2023 Symposium Chairs

Kafai Lai

University of Hong Kong (USA)
2023 Symposium Chair

Qinghuang Lin

LAM Research Corp. (USA)
2023 Symposium Co-Chair

Proceedings will be published on the SPIE Digital Library

Paid registration include proceedings

SPIE Advanced Lithography 2022 conference proceedings are published in the SPIE Digital Library. All paid conference registrations include 50 proceeding downloads with ongoing access through your SPIE account.