Advanced Lithography + Patterning abstract submission guidelines

Submit an abstract of your research and present to your peers

Below are abstract submission instructions, the accompanying submission agreement, conference presentation guidelines, and guidelines for publishing in the Proceedings of SPIE on the SPIE Digital Library. Submissions are subject to chair approval.  View conferences and submit an abstract. 

Browse conference topics

Important dates


Abstracts due 14 September 2022
Registration opens November 2022
Author notified and program posts online 21 November 2022
Submission system opens for manuscripts and poster PDFs* 19 December 2022
Post-deadline abstracts due: Submit via conference listings 9 January 2023
Poster PDFs due for spie.org preview and publication 1 February 2023
Manuscripts due 8 February 2023
Advance upload deadline for oral presentation slides** 24 February 2023

*Contact author or speaker must register prior to uploading
**After this date slides must be uploaded onsite at Speaker Check-In

How-to guide for successful abstract submission


What you will need to submit

  • Title
  • Author(s) information
  • 250-word abstract for technical review
  • 100-word summary for the program
  • Keywords used in search for your paper (optional)
  • Check the individual conference call for papers for additional requirements (for example, some conferences require two- to three-page extended summary for technical review, or have instructions for award competitions)

Note: Only original material should be submitted. Commercial papers, papers with no new research/development content, and papers with proprietary restrictions will not be accepted for presentation.


How to submit your abstract

  • Browse the conference topics to review the conferences
  • Choose one conference that most closely matches the topics of your abstract. You may submit more than one abstract, but submit each abstract only once
  • Click the title of the conference to view the full description and submit by clicking the "Submit An Abstract" button on that page
  • Sign in to your SPIE account, or create an account if you do not already have one
  • Follow the steps in the submission wizard until the submission process is completed


Submission agreement

All presenting authors, including keynote, invited, oral, and poster presenters, agree to the following conditions by submitting an abstract:

  • Register and pay the author registration fee
  • Oral presenters: recording and publication of your onsite presentation (slides synched with voice) for publication in the Proceedings of SPIE in the SPIE Digital Library
  • Poster presenters: submit a poster PDF and optional preview video, by the advertised due dates, for publication in the Proceedings of SPIE in the SPIE Digital Library; poster PDFs may also be published and viewable in the spie.org program during and immediately after the event
  • Submit a 4-page-minimum manuscript, by the advertised due date, for publication in the Proceedings of SPIE in the SPIE Digital Library
  • Obtain funding for registration fees, travel, and accommodations
  • Ensure that all clearances, including government and company clearance, have been obtained to present and publish. If you are a DoD contractor in the USA, allow at least 60 days for clearance
  • Attend the meeting
  • Present at the scheduled time


Review and program placement

  • To ensure a high-quality conference, all submissions will be assessed by the conference chair/editor for technical merit and suitability of content
  • Conference chairs/editors reserve the right to reject for presentation any paper that does not meet content or presentation expectations
  • Final placement in an oral or poster session is subject to chair discretion


Publication of Proceedings in the SPIE Digital Library

Increase your professional visibility and publish in the world's largest collection of optics and photonics research. Your peers access approximately 18 million papers, presentations, and posters from the SPIE Digital Library each year.

  • Only manuscripts, presentations, and posters presented at the conference and received according to publication guidelines and due dates will be published in the Proceedings of SPIE in the SPIE Digital Library
  • Manuscripts, presentations, and posters will be officially published after the event in the SPIE Digital Library
  • Conference chairs/editors may require revision before approving publication and reserve the right to reject for publication any manuscript or presentation that does not meet acceptable standards for a scientific publication
  • Conference chair/editor decision to accept or reject a manuscript, presentation, or poster for publication is final
  • Authors must be authorized to provide a suitable publication license to SPIE; Authors retain copyright of all scientific material
  • SPIE retains rights to distribute and market the official SPIE recording of the presentation and/or submitted video/poster
  • SPIE partners with relevant scientific databases and indexes to enable researchers to easily find papers published in the Proceedings of SPIE. The databases that abstract and index these papers include Astrophysical Data System (ADS), Ei Compendex, CrossRef, Google Scholar, Inspec, Scopus, and Web of Science.
  • More publication information available in the SPIE Digital Library


Contact information

Questions? Contact the SPIE staff coordinator listed in your spie.org account.

For questions about the event, program, your presentation, and/or submitting an abstract, contact your conference program coordinator.

For questions about submitting for, and publication on, the SPIE Digital Library, contact your proceedings coordinator.