29 September - 3 October 2024
Monterey, California, US

SPIE Photomask Technology + EUVL Registration Information

Find the details you need to register for the 2024 event in Monterey

Register for SPIE Photomask Technology + EUVL


Join your colleagues 29 September - 3 October 2024 in Monterey, California. See below for details of what is included, plus exhibition visitor and press registration. Review pricing, SPIE Membership discounts, and more.

Register online

All online charges are made in US dollars. For those paying via bank transfers or administrators registering one or more people:
Download the PDF registration form

Visa information Visa information ...
Event policies Event policies ...

Registration fees in US dollars


Prices increase $170 after 13 September 2024. All online charges are made in US dollars.

NOTE: Join as an SPIE Member to save more than the cost of an annual Membership with a single event registration. Purchase your Membership during check-out.


Purchase Membership and save!
SPIE Member  Non-Member 
Speaker or author, program committee, session chair $970 $1,130
Non-author attendee $970 $1,130
Student $540 $1,130
Booth staff (must be with exhibiting company) Free Free
Exhibition visitor Free Free

What is included with paid registration


             Technical program Exhibition visitor
All presentations, plenaries, and special events
Annual Gala at Portola Hotel & Spa*
50 proceedings downloads**
Exhibition

*Guest admission tickets for the Annual Gala at Portola can be purchased separately for $125.

**Proceedings are fully published on the SPIE Digital Library by six weeks after the event; SPIE will email notification and instructions at this time.

Exhibition registration


  • Exhibition visitor registration is free, but you must register.
  • The Exhibition is open Tuesday 10:00 AM - 4:00 PM, Wednesday 9:30 AM - 4:00 PM.

SPIE Membership discounts


SPIE Members and SPIE Student Members receive special rates for conference registration. Discounts are applied at the time of registration.

SPIE Student Member registration rates are available only to undergraduate and graduate students who are enrolled full time and have not yet received their PhD. Post-docs may not join SPIE as a Student Member.

Not an SPIE Member? Purchase Membership with your registration and receive your discount right away. Or contact membership@spie.org for more information.

Press registration


Refund information


There is a $75 USD service charge for processing refunds for conference or course registrations. Requests for refunds must be received by 13 September 2024; all registration fees will be forfeited after this date. Membership dues and special events are not refundable.

US Government credit cards


US Government credit card users: have your purchasing officer contact the credit card company and get prior authorization before attempting to register. Advise your purchasing agent that SPIE is considered a 8398 company for authorization purposes.

Contact SPIE Customer Service


Email: customerservice@spie.org
Phone: +1 360 676 3290 or +1 888 504 8171
Fax: +1 360 647 1445

Hours of operation:
8:00 AM–5:00 PM PT, Monday–Friday

Universal time:
15:00–01:00 November–March
14:00–00:00 April–October