Contribute your research and help to build another outstanding program for 2023

Make plans to join the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies.

Present your research in Monterey. The call for papers is open.

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To present your research: view important information

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Explore the 2023 conferences

Photomask technology
Extreme ultraviolet lithography technology

View the award recipients

See who won in 2022

View the winners announced at the SPIE Photomask Technology + Extreme Ultraviolet Lithography 2022. Celebrate the important work being done and further help the industry support student participation. View the 2022 winners and start planning for the 2023 award submissions.

Attention students

Student opportunities

Find ways to learn about the technology, the industry, and make important connections for your future. This event includes special awards, sessions, and sponsorships for students.

Don't miss the exhibition

The mask-making industry's premier event

Attend the premier exhibition for mask makers, EUVL, emerging technologies, and mask business. Connect with top suppliers showcasing the newest products, innovations, and latest technologies.