16 - 21 June 2024
Yokohama, Japan
Conference 13093 > Paper 13093-177
Paper 13093-177

Preparing for NewATHENA flight production: recent developments in upscaling SPO plate manufacturing technology

On demand | Presented live 17 June 2024

Abstract

Silicon Pore Optics (SPO) are the technology of choice for building the optics of the next generation X-ray observatory NewATHENA (New Advanced Telescope for High ENergy Astrophysics). Over the past 16 years Micronit has, in close collaboration with cosine and ESA, developed and optimized its manufacturing technology for SPO mirrors. Where the initial focus was on the basic process development, the attention then shifted towards optimizing the process to facilitate the ever-continuing quest for a better half-energy width of the optics. In parallel to these ongoing optimization efforts, more recently the focus is also on upscaling the technology/equipment towards a future flight production scenario, where roughly a ten-fold increase in capacity should be achieved, compared to the current production volume per year.

In this paper we present our current state-of-the-art SPO plate manufacturing process. Special attention is given to the recent advancements in optimizing and upscaling the dicing process, the laser-ID labelling process, wafer-scale automated measurements of plate critical to quality parameters, as well as the lithography process for reflective coating lift-off. Furthermore, the different wedging methodologies and the shift from wetbench processing to spray processing are introduced. The combined efforts in all of these areas enable a more automated plate manufacturing process, and an increase in optical performance of the telescope.

Using a combination of process development and upgraded machinery, the future flight production scenario for NewATHENA begins to take shape.

Presenter

Jeroen Haneveld
Micronit B.V. (Netherlands)
Jeroen Haneveld is an applied physicist with a strong interest in micro- and nanofabrication technology in silicon and glass. In 2006, he received his Ph.D. degree from the University of Twente (Enschede, The Netherlands) for his research on nanofluidic channel fabrication and characterization. After a post-doc project focused on developing, manufacturing and characterizing a micro Coriolis mass flow sensor, he joined Micronit B.V. in 2010. Since then has been active as R&D Project Manager, Business Manager MEMS and, currently, as Process Architect. He is involved as project manager and technology consultant in technologically complex, most often MEMS- and microfluidics-related projects. Silicon Pore Optics technology has always been a common thread throughout his work at Micronit.
Presenter/Author
Jeroen Haneveld
Micronit B.V. (Netherlands)
Author
Bart Schurink
Micronit B.V. (Netherlands)
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Marko Blom
Micronit B.V. (Netherlands)
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Micronit B.V. (Netherlands)
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Micronit B.V. (Netherlands)
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Arenda Koelewijn
Micronit B.V. (Netherlands)
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Jan-Joost Lankwarden
Micronit B.V. (Netherlands)
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Micronit B.V. (Netherlands)
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Micronit B.V. (Netherlands)
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Maurice Wijnperlé
Micronit B.V. (Netherlands)
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cosine measurement systems (Netherlands)
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cosine measurement systems (Netherlands)
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cosine measurement systems (Netherlands)
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Boris Landgraf
cosine measurement systems (Netherlands)
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Adam Lassise
cosine measurement systems (Netherlands)
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cosine measurement systems (Netherlands)
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Aniket Thete
cosine measurement systems (Netherlands)
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cosine measurement systems (Netherlands)
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European Space Agency (Netherlands)
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European Space Agency (Netherlands)
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European Space Agency (Netherlands)