Paper 13093-177
Paper 13093-177
Preparing for NewATHENA flight production: recent developments in upscaling SPO plate manufacturing technology
17 June 2024 • 17:30 - 19:00 Japan Standard Time | Room G5, North - 1F
Abstract
This paper presents an overview of the current state-of-the-art manufacturing process for Silicon Pore Optics mirror plates for NewATHENA. After more than 15 years of process development and with mission adoption expected in 2027, the focus starts to shift towards upscaling and optimizing the production process, to prepare for flight production. We will present recent progress and an outlook towards the future flight production scenario, touching on several areas of the manufacturing process, such as dicing, laser-ID labeling, automated measurement of plate parameters, and photolithography.
Presenter
Jeroen Haneveld
Micronit B.V. (Netherlands)
Jeroen Haneveld is an applied physicist with a strong interest in micro- and nanofabrication technology in silicon and glass.
In 2006, he received his Ph.D. degree from the University of Twente (Enschede, The Netherlands) for his research on nanofluidic channel fabrication and characterization. After a post-doc project focused on developing, manufacturing and characterizing a micro Coriolis mass flow sensor, he joined Micronit B.V. in 2010. Since then has been active as R&D Project Manager, Business Manager MEMS and, currently, as Process Architect. He is involved as project manager and technology consultant in technologically complex, most often MEMS- and microfluidics-related projects.
Silicon Pore Optics technology has always been a common thread throughout his work at Micronit.