Harnessing deep UV and VUV microplasma photonics for emerging applications in atomic clocks, microfabrication processes, and air disinfection (Invited Paper)

Low-temperature microplasmas, efficient sources of ions, electrons, and photons, particularly from microcavity plasma arrays, offer unprecedented performance in photonics. This paper reports recent advancements across three key areas: precise timekeeping, achieved through integrating microplasma mercury ion lamps into miniature clock systems with exceptional stability; uniform and high-fluence photon generation for VUV photolithography and nanopatterning, enabling selective surface modification and low temperature dielectric depositions at nano/micro scales; and deep UV (Far UV-C) excimer emission from microplasma lamps, utilized in preventing airborne as well as foodborne pathogen transmission. Far UV-C's safety for human exposure presents potential for indoor disinfection, including wearable devices, shaping biothreat prevention strategies.