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Mitsuo Takeda

Prof. Mitsuo  Takeda

Professor
University of Electro-Communications

Department of Information and Communication Engineering
The University of Electro-Communications
1-5-1, Chofugaoka
Tokyo  182-8585
Japan

tel: +81 424 43 5276
fax: +81 424 89 6072
E-mail: takeda@ice.uec.ac.jp

Area of Expertise

Optical metrology (interferometry and profilometry), optical information processing (holography), image processing (fringe analysis, signal recovery), imaging systems (design and evaluation of optical systems)

Biography

Education:
1969 BS in EE from the University of Electro-Communications
1971 MS in Applied Physics from the University of Tokyo
1974 Ph.D. in Applied Physics from the University of Tokyo

Research and Professional Experiences:
1974 JSPS Post-doctoral Research Fellow at The Institute of Industrial Science, The University of Tokyo.
1977 R & D Staff Scientist at Canon Inc.
1980 Assistant Professor at UEC (The University of Electro-Communications)
1983 Associate Professor at UEC
1985 Visiting Scholar at Stanford University (Prof. J. W. Goodman's Group)
1990 Professor at UEC

Membership and Activities in Academic Societies:
SPIE, the Society for Photo-Optical Instrumentation Engineers (FELLOW), The Optical Society of America (OSA), The Optical Society of Japan (OSJ), and The Japan Society of Applied Physics

Lecture Title(s)

Principles and Techniques for Optical Three-Dimensional Shape Measurements: From Macroscopic to Microscopic Objects
Because of its inherent non-contact and nondestructive nature, optical three-dimensional shape measurement has vast areas of applications in industry. The size of the objects ranges from macroscopic objects in car and aircraft industries down to microscopic objects in semiconductor industry, while the shape to be measured varies from smooth and continuous shapes in optical testing to the complex and discontinuous shapes of micro-machines and vehicle parts. To meet this wide range of demands, various principles and techniques have been developed.

In this talk we review the theory and the basic principle of optical three-dimensional shape measurements. An attempt will be made to provide a unified and systematic view on various principles of optical proferometry that are seemingly different and unrelated. We first critically review the principle of phase-measuring profilometry, and clarify the strength and the weakness of phase-measuring profilometry such as the heterodyne technique, the phase-shift technique, and Fourier transform profilometry. Then we discuss the possibilities of new approaches to overcome the weakness of the phase-measuring technique, which has been identified as the phase ambiguity. To give specific examples, we will introduce some of the technique that have been developed in my group at UEC, among which are the spatial frequency multiplex technique, a spectral interference microscope, and phase-crossing white-light interferometry.

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