Paul C. Knutrud

Senior Member | Valhalla Technology
Knutrud, Paul C.
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SPIE Membership: 23.2 years
SPIE Awards: Senior status
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Area of Expertise: Metrology, Microscopy, Overlay, Critical Dimension, CD SEM, Product Management
Websites: Company Website
Social Media: LinkedIn
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Profile Summary

Expertise in Systems Application, Engineering and Product Management of Semiconductor Optical Metrology Systems.

US Patent # 6,612,159 B1, Taiwan Patent NI-163761, Sole Author, “Overlay registration error measurement made simultaneously for more than two semiconductor wafer layers.”

US Patent #10,445,889 b2, Sole Author, “Method of measuring offset in an integrated circuit and related technology” (Diamond Algorithm) to provide better repeatability and TIS on Box in Box overlay structures

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