Paul C. Knutrud
Senior Member |
Valhalla Technology
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Expertise in Systems Application, Engineering and Product Management of Semiconductor Optical Metrology Systems.
US Patent # 6,612,159 B1, Taiwan Patent NI-163761, Sole Author, “Overlay registration error measurement made simultaneously for more than two semiconductor wafer layers.”
US Patent #10,445,889 b2, Sole Author, “Method of measuring offset in an integrated circuit and related technology” (Diamond Algorithm) to provide better repeatability and TIS on Box in Box overlay structures
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