Paul C. Knutrud

Senior Member | Valhalla Technology
Knutrud, Paul C.
SPIE Leadership: Retrieving Data, please wait...
SPIE Membership: 22.7 years
SPIE Awards: Senior status
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: Metrology, Microscopy, Overlay, Critical Dimension, CD SEM, Product Management
Websites: Company Website
Social Media: LinkedIn
Contact Details:
Sign In to send a private message or view contact details

Profile Summary

Expertise in Systems Application, Engineering and Product Management of Semiconductor Optical Metrology Systems.

US Patent # 6,612,159 B1, Taiwan Patent NI-163761, Sole Author, “Overlay registration error measurement made simultaneously for more than two semiconductor wafer layers.”

US Patent #10,445,889 b2, Sole Author, “Method of measuring offset in an integrated circuit and related technology” (Diamond Algorithm) to provide better repeatability and TIS on Box in Box overlay structures

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...

Publications

Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research