
Proceedings Paper
Aluminum-enhanced optical coatings for the VUV spectral rangeFormat | Member Price | Non-Member Price |
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Paper Abstract
This paper deals with the approaches to preserve the high reflectance aluminum mirror for the VUV spectral region. Single fluoride and oxides layer, homogeneous multilayer and hybrid multilayer solutions are put forward. Single fluoride and oxides materials have achieved reflectance above 90% at 193 nm.
Paper Details
Date Published: 4 October 2005
PDF: 8 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 59630M (4 October 2005); doi: 10.1117/12.625133
Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)
PDF: 8 pages
Proc. SPIE 5963, Advances in Optical Thin Films II, 59630M (4 October 2005); doi: 10.1117/12.625133
Show Author Affiliations
Minghong Yang, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Alexandre Gatto, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Alexandre Gatto, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Published in SPIE Proceedings Vol. 5963:
Advances in Optical Thin Films II
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)
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