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Micro/Nano Lithography (27)

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EUV Lithography, Second Edition
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3D IC Devices, Technologies, and Manufacturing
Member: $56.10
Non-member: $66.00
Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling
Molecular Theory of Lithography
Member: $78.20
Non-member: $92.00
Introduction to Metrology Applications in IC Manufacturing
Field Guide to Displacement Measuring Interferometry
Introduction to Semiconductor Manufacturing Technology, Second Edition
Principles of Lithography, Third Edition
Member: $86.70
Non-member: $102.00
Chemistry and Lithography
Member: $102.85
Non-member: $121.00
Optical Lithography: Here Is Why
Member: $78.20
Non-member: $92.00
Advanced Processes for 193-nm Immersion Lithography
EUV Lithography
Member: $96.05
Non-member: $113.00
EUV Sources for Lithography
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Field Guide to Optical Lithography
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Optical Imaging in Projection Microlithography
Selected Papers on Resolution Enhancement Techniques in Optical Lithography
Selected Papers on Multiphoton Excitation Microscopy
Resolution Enhancement Techniques in Optical Lithography
Lithography Process Control
Member: $44.20
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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
Diazonaphthoquinone-based Resists
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Image Formation in Low-Voltage Scanning Electron Microscopy
Ludwig Reimer
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SPIE PRESS
Harry L. Stover
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