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Micro/Nano Lithography (32)

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Photon Sources for Lithography and Metrology
Member: $149.60
Non-member: $176.00
Chemistry and Lithography, Second Edition, Vol. 2: Chemistry in Lithography
Optical Lithography: Here is Why, Second Edition
Optical and EUV Lithography: A Modeling Perspective
Extreme Ultraviolet Lithography
Member: $55.25
Non-member: $65.00
Chemistry and Lithography, Second Edition, Vol. 1: The Chemical History of Lithography
Principles of Lithography, Fourth Edition
How to Protect Reticles from Electrostatic Damage
Optical Physics for Nanolithography
EUV Lithography, Second Edition
Member: $102.00
Non-member: $120.00
3D IC Devices, Technologies, and Manufacturing
Member: $56.10
Non-member: $66.00
Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling
Molecular Theory of Lithography
Member: $78.20
Non-member: $92.00
Introduction to Metrology Applications in IC Manufacturing
Field Guide to Displacement Measuring Interferometry
Introduction to Semiconductor Manufacturing Technology, Second Edition
Chemistry and Lithography
Member: $102.85
Non-member: $121.00
Advanced Processes for 193-nm Immersion Lithography
EUV Sources for Lithography
Member: $147.90
Non-member: $174.00
Field Guide to Optical Lithography
Member: $35.70
Non-member: $42.00
Optical Imaging in Projection Microlithography
Selected Papers on Multiphoton Excitation Microscopy
Resolution Enhancement Techniques in Optical Lithography
Lithography Process Control
Member: $44.20
Non-member: $52.00
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