Micro/Nano Lithography (26)

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3D IC Devices, Technologies, and Manufacturing
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Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling
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Molecular Theory of Lithography
Member: $78.20
Non-member: $92.00
Introduction to Metrology Applications in IC Manufacturing
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Field Guide to Displacement Measuring Interferometry
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Introduction to Semiconductor Manufacturing Technology, Second Edition
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Principles of Lithography, Third Edition
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Chemistry and Lithography
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Optical Lithography: Here Is Why
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Advanced Processes for 193-nm Immersion Lithography
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EUV Lithography
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EUV Sources for Lithography
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Field Guide to Optical Lithography
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Optical Imaging in Projection Microlithography
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Selected Papers on Resolution Enhancement Techniques in Optical Lithography
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Selected Papers on Multiphoton Excitation Microscopy
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Resolution Enhancement Techniques in Optical Lithography
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Lithography Process Control
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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
Prosenjit Rai-Choudhury
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
P. Rai-Choudhury
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Diazonaphthoquinone-based Resists
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Image Formation in Low-Voltage Scanning Electron Microscopy
Ludwig Reimer
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SPIE PRESS
Harry L. Stover
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SPIE PRESS
Butrus T. Khuri-Yakub, Calvin F. Quate
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