Dr. Timothy A. Brunner

Fellow Member | Director at ASML Technology Development Ctr
Brunner, Timothy A.
SPIE Leadership: Retrieving Data, please wait...
SPIE Membership: 24.8 years total | 24.8 years voting
SPIE Awards: Fellow status
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: microlithography, optical lithography, process control, IC production lithography
Social Media: LinkedIn
Contact Details:
Sign In to send a private message or view contact details

Profile Summary

For the past 35 years, I have been working in the area of lithographic patterning for IC production - a most fascinating, interdisciplinary area. Some particular interests include advanced image formation, simulation, process control, metrology methods and data analysis.
I have a B.A. from Carleton College in 1975 and a doctorate from MIT in 1980, both in physics. Before joining GLOBALFOUNDRIES in 2015, I worked for IBM, Perkin-Elmer Corporation and Xerox PARC.

SPIE Volunteer Activities

Retrieving Data, please wait...

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...

Publications

Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray