Dr. Shengli Fan

Senior Design Engineer at ASML

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SPIE Membership:	0.2 years
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Area of Expertise:	Computational Lithography, Computational Imaging, Optical Imaging, Diffraction Tomography, Inverse Scattering & Reconstruction Algorithm, Biological and Biomedical Imaging
Social Media:	LinkedIn
ORCID iD:	https://orcid.org/0000-0002-3286-1601

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Profile Summary

My previous research work includes optical diffraction tomography, aiming at the reconstruction of multiply-scattering objects. Now I am a design engineer, focusing on computational lithography. The areas I am interested in are source-mask optimization, optical proximity correction, optical imaging formation, EUV optics.

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