Working since 1981 with industrial Atomic Layer Deposition (ALD) thin film applications.
Good experience also of reactive DC diode sputtering of demanding nonstoichiometric optical films. Process development for tens of ALD applications, outside the high-end IC applications. Main inventor in 20+ patents and patent applications related to ALD technology. Specialties: Customer-driven process development projects, ALD processes and films for optical and photonics purposes, ALD control systems, ALD batch coater and precursor source designs, Problem solving and innovation, Extensive knowledge and hands-on experience with ALD Technology
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