Dr. James F. Cameron

Senior Member | Technical Fellow at DuPont Electronics & Industrial
Cameron, James F.
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SPIE Membership: 17.3 years
SPIE Awards: Senior status
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Area of Expertise: Lithography, Patterning Materials, Photoresists, Electronic Materials, Device Integration, Material Design and Synthesis
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Profile Summary

Recognized expert in the field of materials for advanced semiconductor manufacture. Over 25 years of experience in electronic materials including photoactive materials, photoresists and underlayer films used in the production of state of the art transistor devices. Proven track record of developing innovative materials and products to support semiconductor device scaling: Chemically Amplified (CA) resists [193nm, 248nm & Extreme Ultra-Violet (EUV)], Bottom Antireflective Coatings (BARCs) (including Organic, Silicon & Developable types) and Spin on Carbon (SOC) Underlayers.

Overview of Skills and Expertise
• Expert in organic chemistry, polymer synthesis and organic photochemistry.
• Detailed understanding of advanced materials characterization for electronic materials.
• Extensive experience in all aspects of advanced lithographic patterning.
• In depth knowledge of advanced semiconductor device manufacture.
• Deep insight into product development process including robust design for quality specifications.
• Proven ability to introduce novel technology into the semiconductor industry.

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