Dr. Anthony Yen

Fellow Member | Vice President at ASML
Yen, Anthony
SPIE Membership: 18.8 years total | 18.8 years voting
SPIE Awards: Fellow status
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Area of Expertise: Nanometer Lithography, Optical Physics, Semiconductor Physics, Semiconductor Technology
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Profile Summary

Anthony Yen is Vice President and Head of Technology Development Center, ASML. He joined the company in 2017 with more than thirty years of experience in the field of nanolithography. He received BSEE degree from Purdue University and SM, EE, PhD, and MBA degrees from MIT. From 1991 to 1997, as Member of Technical Staff at Texas Instruments, he worked on resolution enhancing techniques and was an early investigator of optical proximity effects and their correction, culminating in its adoption in the manufacturing of SUN microprocessors. From 1997 to 2003, he was with TSMC where he first led the development of its lithography processes, making TSMC the first company to adopt 193-nm lithography in the manufacturing of (0.13 micron generation of) logic integrated circuits, and then co-led infrastructure development for next-generation-lithography technologies on assignment at SEMATECH. After a three-year stint at Cymer (now part of ASML) as Senior Vice President responsible for marketing, he returned to TSMC in 2006. As head of Nanopatterning Technology Infrastructure Division, he led the development of EUV lithography, including its mask technology, for high-volume manufacturing which began at the 7 nm node. He has over 130 US patents and 100 publications on the patterning of semiconductor devices and circuits. He is a Fellow of SPIE and the IEEE, and a recipient of the Outstanding Electrical and Computer Engineer Award from Purdue University.

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