Dr. Anna Lio

Fellow Member | Senior Principal Engineer at Intel Corp.
Lio, Anna
SPIE Leadership: Retrieving Data, please wait...
SPIE Membership: 8.5 years
SPIE Awards: Fellow status | Senior status | 2020 SPIE Community Champion | 2019 SPIE Community Champion
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: PhotoLithography , EUV Lithography, Photoresists , Material Science, Process Integration
Social Media: LinkedIn
Contact Details:
Sign In to send a private message or view contact details

Profile Summary

Dr. Anna Lio is a Senior Principal Engineer at Intel Corporation, Portland Technology Development. She manages the development of all EUV lithography materials for Intel’s current and next generation technologies.
Prior to that she led the development of lithography processes for Intel’s revolutionary trigate transistor process technology at the 22 nm node.
She joined Intel in 1997 and has worked in the area of photoresist, design rules definition, microprocessor process development and integration for every Intel’s technology starting at the 130nm node. She is the author of several papers and the recipient of 3 Intel Achievement Awards, Intel’s highest technical recognition.
Anna holds a M.S. in Physics from the University of Pisa (Italy) and a PhD in Electrical Engineering from the University of Glasgow (UK). During her PhD, she was a visiting scholar at the Materials Sciences Division at LBNL in Berkeley, CA – an experience that ultimately shaped her personal and professional life.
Anna is passionate about empowering women in science and engineering and is an active mentor at the corporate, college and high school level.
Outside of work Anna enjoys spending time with her two kids and go on rock climbing and mountaineering adventures.

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...


Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?