Harry J. Levinson: The 2022 SPIE Frits Zernike Award for Microlithography
Now a consultant and principal lithographer at HJL Lithography, Harry J. Levinson is a former senior director of GlobalFoundries, a leading semiconductor manufacturer. He spent most of his career working in the field of lithography, starting at Advanced Micro Devices (AMD). He also served for several years as the chairman of the USA Lithography Technology Working Group that participated in the generation of the lithography chapter of the International Technology Roadmap for Semiconductors. Levinson is responsible for creating and establishing critical metrics in lithography processes such as "image log-slope" and "reticle defect impacts" which are used extensively across advanced lithography today.
Levinson, an SPIE Fellow, has published numerous articles on lithographic science, on topics ranging from thin film optical effects and metrics for imaging, to overlay and process control. He holds more than 70 US patents and is the author of three books published by SPIE Press, including Lithography Process Control and Principles of Lithography. His 2020 book, Extreme Ultraviolet Lithography, covers the many aspects of lithographic technology required to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Among other roles with the Society, he has chaired the SPIE Publications Committee, has served on the SPIE Board of Directors, and is the current editor-in-chief of SPIE's Journal of Micro/Nanopatterning, Materials, and Metrology. In recognition of his contributions to SPIE, Levinson received the Society's 2014 Directors' Award.
"It is one of the most difficult things for lithographers to find a person who does not know Dr. Levinson's name," says AS Lithography Consulting CEO and 2019 SPIE Frits Zernike Award recipient Akiyoshi Suzuki. "He is a frequent chair, keynote speaker, tutor, and a smart commentator of various symposia as well as the author of well-known lithography textbooks. His pioneering technological achievements are highly regarded, as is his mentorship of others in the semiconductor community. He managed the lithography division of AMD, led at GlobalFoundries, and has promoted every aspect of lithography, including DUV, immersion, multiple patterning, electron beam, and EUV. Dr. Levinson is a man of both science and practice. His role as a leader in this community, his generous character, and smart views are both reliable and ongoing."