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Dr. Marc D. Himel

Dr. Marc D. Himel

Business Development Manager - Micro-optics
Jenoptik Gmbh

Winter Springs FL 32708
United States

tel: 704 900 3455
E-mail: marc@colorfulsky.com

Area of Expertise

Leadership, management of technology, project management, applications of micro-optics, lithographic illumination


Dr. Himel, an SPIE Fellow since 2010, received his BS degree in Physics from the California Polytechnic State University in 1984, his PhD in Optical Sciences from the University of Arizona in 1988, and an MBA from the University of Connecticut in 1998. Following his PhD, Dr. Himel worked as a Post Doctoral Research Associate at the Center for Research in Electro-Optics and Lasers at the University of Central Florida performing research on the characterization of thin film coatings. For 14 years, he worked in the design and development of advanced lithography systems starting with three years at AT&T Bell Laboratories working on the development of Extreme Ultraviolet Lithography, followed by five years at SVG Lithography Systems working on excimer laser based illumination systems, and twelve years at DigitalOptics Corporation) where he concentrated his efforts on the application of diffractive micro-optics for advanced lithography, inspection, and consumer applications. Dr. Himel is currently a Business Development Manager at Jenoptik Gmbh. His research and development activity has resulted in over 46 published papers and one patent.

Lecture Title(s)

The Incredible Shrinking Camera
Photography has changed dramatically in the last 10 years. The development of digital imaging has had a revolutionary effect on how we share daily experiences. Camera-enabled devices allow us to instantaneously capture and share pictures and video with anyone, anywhere on the planet. To meet market demand for video and still cameras in mobile phones and other consumer electronic devices, camera modules must be reduced in size and cost. Conventional camera-module manufacturing is no longer scalable to the sizes necessary for cost effective integration into a broad range of devices. Using standard semiconductor techniques to manufacture wafer-based optics has the potential to overcome this barrier and offer manufacturers a way to further reduce the size and cost of the camera module.

Micro-Optics: From Theory to Real World Application
Micro-Optic technology is beginning to play a significant role in our every day lives, but this goes largely unnoticed. This talk will briefly discuss the design and fabrication of micro-optics and micro-optic assembly, but it will primarily focus on how these technologies are benefiting our lives today and in the future.

Extending Optical Lithography with Free Form Diffractive Optical Elements Used for Off Axis Illumination
The march to the 22nm node will most likely be accomplished without EUV lithography or any of the new alternative lithographic technologies. Accordingly, 193nm optical lithography will be extended to meet this need by leveraging state-of-the-art resolution enhancement techniques such as immersion lithography, double patterning technology, and source mask optimization (SMO). The process window enhancements provided by SMO in a multi-production line environment can only be attained from high-performance diffractive optical elements (DOEs) capable of freeform pupil illumination with consistently repeatable performance. We present advancements in the manufacture of high-performance DOEs used in stepper/scanner off-axis illumination systems. These advancements have been made by employing high resolution lithographic techniques, in combination with precision glass-etching capabilities. Enhanced performance of DOE designs is demonstrated, including higher efficiency with improved uniformity for multi-pole illumination at the pupil plane, while maintaining low on-axis intensity.

Values at Work
The long term success of today’s businesses is not just measured by revenue and profits, but by the impact they have on society. Key to this success is their integrity, fairness, social responsibility, compassion, and respect for others. This participative talk discusses how to integrate these values into your workplace.

Harnessing Light for a Better World
The first optical devices date back 2700 years while the laser was invented just 50 years ago. Advances in these technologies in the 20th century that are continuing (and perhaps accelerating) today have led to the development of products and systems that impact our lives on a daily basis. From vision enhancement to early disease diagnosis, from gaming interfaces to high speed communication networks, from renewable energy to enhanced security, from the cosmic scale to the molecular level, optical science and engineering is a fertile ground for the creative scientist and engineer. This talk will provide an overview of how our world today is impacted by optics and lasers and will look to how optics can assist with some of the greatest engineering challenges we face in the coming decades.

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