• Digital Forum
    How to Participate
    Live Plenary Session
    Special Events
    Other Information:
    SPIE Event Policies
    For Authors and Presenters
    For Exhibitors
Free Digital Forum
Online Only
21 - 25 September 2020
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Thank you for participating in the 2020 Digital Forum

SPIE Photomask Technology + EUV Lithography Digital Forum

Thank you for joining your colleagues online

We know we all miss our annual in-person conference in Monterey, but thanks to your enthusiastic participation over 1,500 academics, researchers, engineers, and scientists were able to connect online during the Digital Forum. Amazing research in mask making, EUVL, emerging technologies, and the future of mask business was shared, products were demonstrated, and networking discussions had - thanks to your continued commitment to advancing science.

Remember, if you registered for the Digital Forum, you now have ongoing access to the conference content on the SPIE Digital Library. You can continue to review video presentations for both authors and exhibitors, posters, Plenary sessions, and manuscripts. Just sign in to your SPIE account to start accessing program content.

Here's hoping we are all back in-person next year. Until then, stay safe and continue the good work.

people registered

Mark your calendar
26 - 30 September 2021

View the details for the Photomask Technologies conference and EUVL conference
Learn more about the 2020 Photomask Technologies and EUVL Exhibition
See the 2020 Plenary Speaker
View the 2020 special events

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Photomask Technology 2020 Chairs

Moshe E. Preil

Moshe E. Preil
KLA-Tencor Corp. (USA)
Conference Chair

Stephen P. Renwick

Stephen P. Renwick
Nikon Research Corp. of America (USA)
Conference Co-Chair

International Conference on Extreme Ultraviolet Lithography 2020 Chairs

Patrick P. Naulleau

Patrick P. Naulleau
Lawrence Berkeley National Lab. (United States)
Conference Chair

Paolo A. Gargini

Paolo A. Gargini
Stanford Univ. (United States)
Conference Chair

Toshiro Itani

Toshiro Itani
Osaka Univ. (Japan)
Conference Chair

Kurt G. Ronse

Kurt G. Ronse
imec (Belgium)
Conference Chair

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