Past Event Overview

View 2015 News and Photos

Thank you for all those who attended SPIE Advanced Lithography 2015, the premier conference for the lithography community. For 40 years, SPIE has brought together industry leaders to solve the latest challenges in lithography and patterning in the semiconductor industry.

See what happened: 2015 onsite news and photos

Review the 2015 Program
2015 Final Technical Program (4 MB PDF)
2015 Technical Abstracts (1 MB PDF)
2015 Exhibition Guide (2 MB PDF)

2015 Plenary Speakers
 Dr. Xiaowei Shen

Internet-of-Things: Cloud Platform and Industry Solutions
Dr. Xiaowei Shen
Director, IBM Research,
China

 Dr. Tsu-Jae King Liu

Sustaining the Silicon Revolution: From 3D Transistors to 3D Integration
Dr. Tsu-Jae King Liu
Chair of the Dept. of Electrical Engineering and Computer Sciences,
Univ. of California, Berkeley

View Dr. Tsu-Jae King Liu's 2015 presentation

 Dr. Alan Willner

Activities of the National Photonics Initiative
Dr. Alan Wilner
Sample Chaired Professor of Engineering,
Univ. of Southern California

View Dr. Alan Wilner's 2015 presentation


Plenaries sponsored by: