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San Jose Convention Center
San Jose, California, United States
23 - 27 February 2020
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Review highlights from AL 2019. Get ready for 2020.

See the hightlights from the 2019 SPIE Advanced Lithography

Make plans to attend
Find photos and presentations from SPIE Advanced Lithography 2019, while you peruse the 2020 program. This is the leading global lithography event, and over the years, the event has provided the key forum for industry experts, researchers, and key players working on patterning technology development. Participants learn and share the latest developments in important areas vital to several technology fields. 

We look forward to you joining us 23 - 27 February 2020!

2020 Registration
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Download 2019 PDFs
Final Program
Exhibition Guide

Watch the 2019 Plenary Presentation, The Future is Quantum by Dario Gil, IBM Research

See photos captured throughout the week


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