Attend and hear research, challenges, and breakthroughs as you gather with colleagues in San Jose

Join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.
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Five days of exciting content and connecting with your community

  • Plenary talks
  • Technical presentations
  • Networking sessions
  • Course offerings
  • Exhibition

2023 Plenary presentations: come to hear from experts


Explore six great conferences

  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

Add a course to your conference experience


Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Several courses are available in San Jose.

Exhibition at Advanced Lithography + Patterning


Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and to get business done. Find these technology solutions and more:
• Ultrafast, high-resolution optical imaging and spectroscopy
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Preview a webinar recording before attending


Learn about career opportunities

In this video, technology leaders share information about the important, rapidly-expanding, and lucrative semiconductor industry.

Listen in on topics important to the community

Experts in the field discuss the progress of pellicle development.

Carbon nanotube pellicles for EUV lithography: form, function, and progress, presented by Emily Gallagher (imec)

Feeling nostalgic? See highlights from 2022


View highlights, news articles, and photos from the 2022 event in San Jose. Then, be sure not to miss this amazing program in 2023. 

View highlights

Proceedings will be published on the SPIE Digital Library


Presentations become published works

SPIE Advanced Lithography + Patterning conference proceedings are published in the SPIE Digital Library. All paid conference registrations include proceeding downloads with ongoing access through your SPIE account.

Visit the Digital Library to see all past years of proceedings from this meeting.

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