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San Jose Marriott and San Jose Convention Center
San Jose, California, United States
21 - 25 February 2021
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The semiconductor industry's most important lithography exhibition of the year

SPIE Advanced Lithography Exhibition

Attend the 2020 exhibition 
Global suppliers for lithography research and development, devices, tools, fabrication, and services gather at this annual free exhibition. Meet everyone who is anyone in the industry, from semiconductor suppliers and integrators to manufacturers—all in one place.

Exhibiting companies >
2020 Exhibition Guide >

2020 Exhibition dates and hours

Tuesday 25 February 10:00 AM - 5:00 PM
Wednesday 26 February 10:00 AM - 4:00 PM

Featured technologies

See suppliers for lithography R&D, devices, tools, fabrication, and services.

You'll meet 50 global suppliers in these areas:

 • Lithography: immersion, double patterning, e-beam, EUV, optical/laser, RET
 • Metrology, inspection, OPC, and process control
 • Design and manufacturing software
 • Materials and chemicals
 • Imaging equipment
 • Lasers
 • Resist materials and processing
 • Nano-imprint
 • IC and chip fabrication
 • Nanoscale imaging
 • Etch Technology for nanopatterning

Interested in participating?

Learn more about exhibiting on the For Exhibitors page
Become a sponsor

Learn more about exhibiting at SPIE Advanced Lithography