• Advanced Lithography
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San Jose Convention Center
San Jose, California, United States
25 February - 1 March 2018
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Award Presentations at 2018 Advanced Lithography

Award Announcements for conference 10585--Metrology, Inspection, and Process Control for Microlithography

Monday 26 February * 11:00 AM to 11:10 AM

Presentation of the 2017 Diana Nyyssonen Memorial Award for Best Paper

Award Sponsored by

Hitachi Logo

Thursday 1 March * 10:20 AM to 10:30 AM

Presentation of the 2018 Karel Urbanek Best Student Paper Award

Award Sponsored by

KLA-Tencor Logo

Award Announcements for conference 10586--Advances in Patterning Materials and Processing Technology

Monday 26 February * 11:00 AM to 11:10 AM

Presentation of the 2017 C. Grant Willson Award for Best Paper


Presenation of the 2017 Hiroshi Ito Memorial Award for the Best Student Paper

These Two Awards Sponsored by


Presentation of the 2017 Jeffrey Byers Memorial Best Poster Award


Award Sponsored by

Tokyo Electron

Award Announcements for conference 10587--Optical Microlithography

Thrusday 1 March * 10:30 AM to 10:40 AM

Presentation of the 2018 Cymer Leadership Best Student Paper Award in Microlithography

Award Sponsored by

  Cymer ASML

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Important Dates

Late submissions made online considered by the chairs

Author Notification
26 October 2017

Manuscripts Due
31 January 2018

Present to Room-Publish to World

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