25 - 29 February 2024
San Jose, California, US

Thank you for helping us make 2024 an incredible event

This symposium hosted leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. The community joined to hear research, challenges, and breakthroughs, and we look forward to coming together again in 2025.

Save the dates: 23 - 27 February 2025
#SPIElitho Twitter logo Facebook logo Instagram logo Youtube logo Linkedin logo

Thank you to our sponsor:

Five days of exciting content and connecting with your community

  • Plenary talks
  • Technical presentations
  • Networking sessions
  • Course offerings
  • Exhibition

World-class speakers in 2024

Explore six great conferences

  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

Learn about career opportunities

Watch a webinar recording from the technical community

Students and others are encouraged to watch this webinar recording covering the basics of semiconductor lithography, the careers available, and a preview of Advanced Lithography + Patterning 2024. Opportunities for students to apply for full funding to attend the event in February is included in the discussion.

Watch to learn more!

Add a course to your conference experience

Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Several courses will be available in San Jose.

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and to get business done. Find these technology solutions and more:
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Opportunities for students

Students: Learn how to attend this event for free

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage and learn about the semiconductor industry, as well as share their latest research in lithography and photomask technologies. Leading companies support student participation through grants and awards, and tech groups offer scholarships for graduate and undergraduate applicants.

Proceedings will be published on the SPIE Digital Library

Presentations become published works

SPIE Advanced Lithography + Patterning conference proceedings are published in the SPIE Digital Library. All paid conference registrations include proceeding downloads with ongoing access through your SPIE account.

Visit the Digital Library to see all past years of proceedings from this meeting.

Stay involved

Mail icon: Sign up for emails to stay informed about SPIE Advanced Lithography + Patterning Sign up for emails Sign up for emails ...
Phone icon: Find the SPIE app that keeps you connected to Advanced Lithography + Patterning Get the conference app Get the conference app ...