• Advanced Lithography
    Plan to Attend
    Award Announcements
    Special Events
    Travel to San Jose
    Onsite Services
    SPIE Safe Meeting Policy
    For Authors and Presenters
    For Chairs and Committees
    For Exhibitors
    Become a Sponsor
San Jose Convention Center
San Jose, California, United States
24 - 28 February 2019
Search Program:  go
Print PageEmail PageView My Schedule

Attend SPIE Advanced Lithography, the leading global lithography event

Register for SPIE Advanced Lithography 2019

Join us in San Jose
Hear the latest advancements in optical lithography, metrology, or EUV. Join us at the meeting where leaders come to solve challenges in lithography, patterning technologies, and materials for the semiconductor industry.

Stay up-to-date. Unless you opt in to receive email from SPIE, you will not be sent info about SPIE Advanced Lithography. Sign up

Hotel reservations
1 February 2019
Book early, last year sold out

Registration rates increase
8 February 2019

Download the SPIE Advanced Lithography Advance Program PDF

View the 2019 technical papers
Register for SPIE Advanced Lithography 2019
Make your hotel reservations today for SPIE Advanced Lithography 2019

2019 Plenary presentations, important speakers and the hottest topics

2019 SPIE Advanced Lithography Plenary Speakers

Featured Sponsor, Canon

Important information for speakers

All presenters must upload their presentation to Launchpad before going to their conference room. There will not be an option to use your own device. Learn more

Take a course while you are in San Jose attending SPIE Advanced Lithography


Get the most out of your conference experience by taking a course. Advanced Lithography offers 13 courses taught by recognized experts in industry and academia.

Don't miss the SPIE Advanced Lithography exhibition


See the latest products and meet the industry's top suppliers, integrators, and manufacturers.


Event highlights from 2018

Watch the videos from last year's plenary speakers

2018 Plenaries

Past presentations are available as open access on the SPIE Digital Library.

Watch videos
View the 2018 Final Technical Program

2018 Program

View the 2018 program to see last year's papers, special events, and more. 

Download PDF
Access 2018 Proceedings on the SPIE Digital Library


Attended in 2018? Access proceedings and conference presentations.

View papers

Connect with SPIE

                  #SPIElitho FB Twitter Check out SPIE on Instagram SPIE.tv SPIE LinkedIn Group

Sign up for email updates about SPIE Advanced Lithography