Presentation + Paper
31 August 2022 Optimizing silicon UV detector response with antireflection coatings, solar-blind bandpass filters, and linear variable filters
April D. Jewell, Ghazaleh Kafaie Shirmanesh, John Hennessy, Shouleh Nikzad
Author Affiliations +
Abstract
JPL’s 2D-doping processes have been proven to exhibit nearly 100% internal QE (i.e. reflection-limited response) from extreme ultraviolet (UV) to the near infrared (NIR). Response can be further optimized and tailored with AR coatings and/or bandpass filters; however, due to silicon’s optical properties, there is no “one size fits all” coating/filter solution that can span the entire UV to NIR wavelength range. Our team has developed a catalog of coating and filter designs suitable for a variety of applications, several of which have already been implemented/deployed. Spectroscopy applications often benefit from a spatially varying detector response optimized according to the instrument’s optical dispersion. Spatially varying the detector response to correspond with instrument dispersion requires that different coatings be applied to different portions of the detector. We have recently demonstrated detectors with a butcher-block style response profile with each portion of the device targeting a specific bandpass—similar to a linear variable filter. This technological advancement is achieved through the intentional and controllable patterning of AR coating(s) on delta-doped arrays. Herein we review implementations/deployments of delta-doped UV detectors with AR and bandpass filter coatings as well as progress on the variable response UV detectors.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
April D. Jewell, Ghazaleh Kafaie Shirmanesh, John Hennessy, and Shouleh Nikzad "Optimizing silicon UV detector response with antireflection coatings, solar-blind bandpass filters, and linear variable filters", Proc. SPIE 12181, Space Telescopes and Instrumentation 2022: Ultraviolet to Gamma Ray, 121810G (31 August 2022); https://doi.org/10.1117/12.2630552
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KEYWORDS
Sensors

Antireflective coatings

Silicon

Aluminum

Quantum efficiency

Bandpass filters

Ultraviolet radiation

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