SPIE Frits Zernike Award for Microlithography

The SPIE Frits Zernike Award for Microlithography is presented for outstanding accomplishments in microlithographic technology, especially those furthering the development of semiconductor lithographic imaging and patterning solutions. Honorarium $2,000.

Frits Zernike (July 16, 1888 - March 10, 1966) was a Dutch chemist, physicist and mathematician who won the Nobel Prize for physics in 1953 for his invention of the phase-contrast microscope. He discovered that ghost lines that occur to the left and right of each primary line in spectra created by means of a diffraction grating, have their phase shifted from that of the primary line by 90 degrees, leading to his phase contrast technique in microscopy. His orthogonal circle polynomials provided a solution to the optimum 'balancing' problem of aberrations in optical instruments.