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Optical Micro- and Nanometrology in Microsystems Technology II
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Volume Details

Volume Number: 6995
Date Published: 2 June 2008

Table of Contents
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Front Matter: Volume 6995
Author(s): Proceedings of SPIE
Sensitivity increase in digital holographic interferometry
Author(s): Nazif Demoli; Kristina Šariri; Ivica Sović; Marc Torzynski; Hanan Halaq; Dalibor Vukičević
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Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy
Author(s): Jonas Kühn; Florian Charrière; Tristan Colomb; Frédéric Montfort; Etienne Cuche; Yves Emery; Pierre Marquet; Christian Depeursinge
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Undersampled digital holographic interferometry
Author(s): H. Halaq; N. Demoli; I. Sović; K. Šariri; M. Torzynski; D. Vukičević
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Digital holography in combination with diffraction grating to get super-resolution
Author(s): M. Paturzo; F. Merola; S. Grilli; S. De Nicola; P. Ferraro
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Phase map retrieval in digital holography: avoiding the under-sampling effect by a lateral shear approach
Author(s): P. Ferraro; C. Del Core; L. Miccio; S. Grilli; S. De Nicola; A. Finizio; G. Coppola
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Application of light emitting diodes in digital holographic microscopy
Author(s): Stephan Stürwald; Björn Kemper; Christian Remmersmann; Patrik Langehanenberg; Gert von Bally
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Adaptive measurement of deformation and shape by compensation using TV holography and digital holography
Author(s): János Kornis; Bence Béki; Richárd Séfel
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Sensitivity enhancement of integrated optical near field sensors
Author(s): Julia Hahn; Frank Fecher; Juergen Petter; Theo Tschudi
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Integrated optic Michelson interferometer for sensors application
Author(s): P. Marć; C. Gorecki; Ł. Nieradko
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Development features in large-range nanoscale coordinate metrology
Author(s): Martin Gruhlke; Christian Recknagel; Hendrik Rothe
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Electron beam nanolithography and testing: ways of increasing the resolution and the throughput
Author(s): Vladimir A. Zlobin
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AlN driven microcantilever actuators: modeling, fabrication, characterization
Author(s): K. Krupa; M. Józwik; A. Andrei; Ł. Nieradko; C. Gorecki; P. Delobelle; L. Hirsinger
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Characterization of MEMS cantilevers using lensless digital holographic microscope
Author(s): Vijay Raj Singh; Alexandru Andrei; Christophe Gorecki; Lukasz Nieradko; Anand Asundi
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Nondestructive determination of drying deformations in cement paste by means of ESEM and digital image analysis
Author(s): Dragana Jankovic
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Numerical simulations of interferometrical deformation measurements in multi-layered objects
Author(s): Kay Gastinger; Pål Løvhaugen; Ola Hunderi
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Fusion of micro-metrology techniques for the flexible inspection of MEMS/MOEMS assembly
Author(s): R. Schmitt; A. Pavim
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Benchmarking instrumentation tools for the characterization of microlenses within the EC Network of Excellence on Micro-Optics (NEMO)
Author(s): H. Ottevaere; J. Schwider; J. Kacperski; L. Steinbock; K. Weible; M. Kujawinska; H. Thienpont
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Interest of second harmonic generation imaging to study collageneous matrix modification in osteoarthritis disease
Author(s): Elisabeth Werkmeister; Natalia de Isla; Luc Marchal; Didier Mainard; Jean-François Stoltz; Dominique Dumas
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Real time and in situ monitoring of microlenses fabricated with deep proton writing
Author(s): Virginia Gomez; Heidi Ottevaere; Hugo Thienpont
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Precision metrology length standard based on femtosecond stabilized laser
Author(s): R. Šmíd; O. Číp; J. Lazar
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A multipoint diffraction strain sensor using a micro-lens array: from theory to application
Author(s): Jun Wang; Anand Asundi
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Comparison of 127I2-stabilized frequency-doubled Nd: YAG lasers and evaluation of frequency shifts caused by iodine cells
Author(s): Jan Hrabina; Petr Jedlička; Ondřej Číp; Josef Lazar
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Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler
Author(s): X. Colonna de Lega; Peter J. de Groot
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Improved micro topography measurement by LCoS-based fringe projection and z-stitching
Author(s): X. Schwab; C. Kohler; K. Körner; N. Eichhorn; W. Osten
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Photonic wires sidewall roughness measures using atomic force microscope capabilities
Author(s): Radu Malureanu; Lars Hagedorn Frandsen
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Computational methods estimating uncertainties for profile reconstruction in scatterometry
Author(s): H. Gross; A. Rathsfeld; F. Scholze; R. Model; M. Bär
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On quasi-phase-conjugated arrays
Author(s): G. Kloos
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Modeling reflection on coated steel surfaces
Author(s): V. Goossens; E. Stijns; N. Gotzen; S. Van Gils; H. Terryn
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Full-field analysis of a liquid crystal cell using a low birefringence polariscope
Author(s): Wang Pin; Anand Asundi
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Investigation of methods to set up the normal vector field for the differential method
Author(s): Stephan Rafler; Peter Götz; Matthias Petschow; Thomas Schuster; Karsten Frenner; Wolfgang Osten
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Phase retrieval from the spectral interferograms by windowed Fourier transform
Author(s): P. Hlubina; J. Luňáček; D. Ciprian; R. Chlebus; M. Luňáčková
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Wrap-free phase retrieval using a series of intensity measurements produced by tuning the illumination wavelength
Author(s): Peng Bao; Fucai Zhang; Giancarlo Pedrini; Wolfgang Osten
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A Fourier-optics-based non-invasive and vibration-insensitive micron-size object analyzer for quality control assessment
Author(s): Sarun Sumriddetchkajorn; Kosom Chaitavon
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Ultra-fast wavefront analyser for high volume production of camera modules lenses
Author(s): M. Cherrier; I. Erichsen; A. Ruprecht; S. Krey
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Pixel size determination of a monitor using moiré fringe
Author(s): Mohammad Abolhassani; Rahil Daman
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Accurate three-dimensional detection of micro-particles by means of digital holographic microscopy
Author(s): Maciej Antkowiak; Natacha Callens; Cédric Schockaert; Catherine Yourassowsky; Frank Dubois
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Energy characteristics of excitons in InGaN/GaN heterostructures
Author(s): S. O. Usov; A. F. Tsatsul'nikov; W. V. Lundin; A. V. Sakharov; E. E. Zavarin; M. A. Sinitsyn; N. N. Ledentsov
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In-situ imaging of interlayer nanodeformation with improved differential confocal microscopy
Author(s): Z. Li; S. Gao; K. Herrmann
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Investigation of high reflectivity optical phase-conjugation in BaTiO3
Author(s): M. H. Majles Ara; S. R. Hosseini Sr.; M. Abolhassani
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