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Instrumentation, Metrology, and Standards for Nanomanufacturing
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Volume Details

Volume Number: 6648
Date Published: 10 September 2007

Table of Contents
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Front Matter: Volume 6648
Author(s): Proceedings of SPIE
Instrumentation, metrology, and standards: key elements for the future of nanomanufacturing
Author(s): Michael T. Postek; Kevin Lyons
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Infrared reflectivity spectroscopy of optical phonons in short-period AlGaN/GaN superlattices
Author(s): J. B. Herzog; A. M. Mintairov; K. Sun; Y. Cao; D. Jena; J. L. Merz
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Near-field birefringence response in thickness direction of liquid crystal thin film
Author(s): Jing Qin; Norihiro Umeda
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The helium ion microscope: a new tool for nanomanufacturing
Author(s): Michael T. Postek; Andras E. Vladár; John Kramar; Lewis A. Stern; John Notte; Sean McVey
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Length calibration standards for nano-manufacturing
Author(s): David C. Joy; Sachin Deo; Brendan J. Griffin
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Microstructure of 100 nm damascene copper overburden and lines
Author(s): R. H. Geiss; D. T. Read
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Nanomanufacturing via fast laser-induced self-organization in thin metal films
Author(s): C. Favazza; H. Krishna; R. Sureshkumar; R. Kalyanaraman
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Integration, interoperability, and information management: What are the key issues for nanomanufacturing?
Author(s): Kevin W. Lyons
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Modelling of angle-resolved x-ray photoelectron spectroscopy (ARXPS) intensity ratios for nanocharacterisation of closely packed shell-core nanofibres
Author(s): Jian Wang; Peter J. Cumpson
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Optimal architecture of a neural network for a high precision in ellipsometric scatterometry
Author(s): Issam Gereige; Stéphane Robert; Gérard Granet
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Nano-precision dynamic motion control
Author(s): Chi-Ying Lin; Tsu-Chin Tsao
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Combining coordinate measurement and nanometrology for large-range nanoscale metrology
Author(s): Martin Gruhlke; Hendrik Rothe
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Computational modeling of laser-induced self-organization in nanoscopic metal films for predictive nanomanufacturing
Author(s): Justin Trice; Ramki Kalyanaraman; Radhakrishna Sureshkumar
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In silico design of metal-dielectric nanocomposites for solar energy applications
Author(s): Justin Trice; Hernando Garcia; Radhakrishna Sureshkumar; Ramki Kalyanaraman
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A CAD integration framework for designing devices with atomic scale resolution
Author(s): Yu-Chi Chang; Krishnan Ramaswami; Miguel Pinilla; Stephen Walch; Fritz Prinz
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A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctions
Author(s): Philip W. T. Pong; Moshe Schmoueli; Eliezer Marcus; William F. Egelhoff Jr.
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Silicon test object of the linewidth of the nanometer range for SEM and AFM
Author(s): Yu. A. Novikov; V. P. Gavrilenko; Yu. V. Ozerin; A. V. Rakov; P. A. Todua
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Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscope
Author(s): P. A. Todua; M. N. Filippov; V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov
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Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope
Author(s): V. P. Gavrilenko; M. N. Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Spatial redistribution of nano-particles using electrokinetic micro-focuser
Author(s): Daniel Ernest Garcia; Aleidy Silva; Chih-Ming Ho
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