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Proceedings Paper

Novel diffraction gratings fabricated by means of plasma nanotechnologies
Author(s): N. Ebizuka; Makoto Sekine; K. Ishikawa; H. Kondo; M. Hori; M. Sasaki; A. Bianco; F. Maria Zerbi; Y. Hirahara; W. Aoki
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Paper Abstract

A volume phase holographic grating (VPHG) achieves very high diffraction efficiency up to 100% for S or P polarized light at the first diffraction order. However, diffraction efficiency of the VPHG for non-polarized light becomes low according as Bragg angle becomes large, and bandwidth of diffraction efficiency becomes narrow according as refractive index modulation of grating lattice becomes small. A volume binary grating with rectangular lattice, consists of high and low refractive index media with large or small duty ratio, is able to achieve very high efficiency nearly 100% and a wide band width for both S and P polarization light. We have successfully fabricated germanium immersion gratings of step groove shape with resolving power of 45,000 at 10 micron by using a nano-precision 3D grinding machine and ELID (ELectrolytic In-process Dressing) method. However, the method requires a large amount of machine times and efforts. We had proposed a novel immersion grating with slot shape lattice of total reflection mirrors, which achieves high performance and lower fabrication cost. We describe the photolithography and the latest plasma nano-technologies for fabrications of the novel diffraction gratings in our presentation. We also introduce birefringence volume gratings in this article.

Paper Details

Date Published: 13 September 2012
PDF: 7 pages
Proc. SPIE 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II, 84502Y (13 September 2012); doi: 10.1117/12.925869
Show Author Affiliations
N. Ebizuka, Nagoya Univ. (Japan)
Makoto Sekine, Nagoya Univ. (Japan)
K. Ishikawa, Nagoya Univ. (Japan)
H. Kondo, Nagoya Univ. (Japan)
M. Hori, Nagoya Univ. (Japan)
M. Sasaki, Toyota Technological Institute (Japan)
A. Bianco, INAF - Osservatorio Astronomico di Brera (Italy)
F. Maria Zerbi, INAF - Osservatorio Astronomico di Brera (Italy)
Y. Hirahara, Nagoya Univ. (Japan)
W. Aoki, National Astronomical Observatory (Japan)


Published in SPIE Proceedings Vol. 8450:
Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II
Ramón Navarro; Colin R. Cunningham; Eric Prieto, Editor(s)

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