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Proceedings Paper

Time resolved EUV pump-probe microscopy of fs-LASER induced nanostructure formation
Author(s): R. Freiberger; J. Hauck; M. Reininghaus; D. Wortmann; L. Juschkin
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Paper Abstract

We report on our efforts in design and construction of a compact Extreme Ultraviolet (EUV)-pump-probe microscope. The goal is the observation of formation of nanostructures, induced by a femtosecond (fs)-laser pulse. The unique interaction processes of fs-laser radiation with matter open up new markets in laser material processing and, therefore, are actively investigated in the last decade. The resulting "sub 100 nm"-structures offer vast potential benefits in photonics, biotechnology, tribological surface design, plasmonic applications and production of nanoparticles. Focused fs-laser radiation causes a local modification resulting in nanostructures of high precision and reproducibility. However the formation dynamics is not well understood. Research in this field requires high temporal and spatial resolution. A combination of fs-laser and EUV-microscope provides a tool for "in situ"-observation of the formation dynamics. As exemplary structures to be investigated, we use nanojets on thin gold films and periodic surface structures (ripples) on dielectrics. In the future, the EUV-pump-probe microscope can become a versatile tool to observe physical or biological processes. Microscopy using EUV-light is capable of detecting structures on a scale down to several tens of nanometers. For detailed investigations a compact EUV-microscope has been realized utilizing OVI Balmer-alpha radiation at 17.3 nm coming from a discharge produced oxygen plasma. As optical elements a grazing incidence elliptical collector and a zone plate with a width of outermost zone of 50 nm and a spectral filter to avoid chromatic aberrations are used. The detector is a fast gated microchannel plate with a pore size of 2 microns contacted by a low impedance transmission line. The expected spatial resolution of the setup is better than 100 nm and the time resolution is better than 1 ns. The newly developed EUV-microscope is a powerful tool for a wide field of investigations that need high time and spatial resolutions simultaneously.

Paper Details

Date Published: 4 May 2011
PDF: 7 pages
Proc. SPIE 8076, EUV and X-Ray Optics: Synergy between Laboratory and Space II, 80760K (4 May 2011); doi: 10.1117/12.886872
Show Author Affiliations
R. Freiberger, RWTH Aachen Univ. (Germany)
J. Hauck, RWTH Aachen Univ. (Germany)
M. Reininghaus, RWTH Aachen Univ. (Germany)
D. Wortmann, RWTH Aachen Univ. (Germany)
L. Juschkin, RWTH Aachen Univ. (Germany)

Published in SPIE Proceedings Vol. 8076:
EUV and X-Ray Optics: Synergy between Laboratory and Space II
René Hudec; Ladislav Pina, Editor(s)

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