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Proceedings Paper

Investigation of miniature fiber optic surface-mountable Fabry-Perot pressure sensor built on 45° angled fiber
Author(s): H. Bae; M. Yu
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Paper Abstract

We present a surface-mountable miniature Fabry-Perot (FP) pressure sensor that exploits the total internal reflection at a polished 45° angled fiber end face to swerve the optical axis by 90°. Optical analysis of the sensor system is performed based in ABCD method in terms of intensity of the beams reflected from each mirror and visibility of the sensor compared to conventional sensor system. One unique feature of the surface-mountable sensor is its embeddability with minimum intrusiveness to the system. By using the fiber as a waveguide, as well as an inherent mask for photolithography, a self-aligned FP cavity is constructed. A polymer-metal composite diaphragm is employed as a deflection diaphragm for pressure sensing which enables achieving higher sensitivity and low-cost fabrication over silicon diaphragm. The sensor exhibits a good linearity over the designed pressure range. Fiber Bragg grating is embedded in the vicinity of the pressure sensor to solve the problem of cross sensitivity between pressure and temperature by measuring the temperature of the system and compensating the temperature effect. This sensor is expected to impact many fronts where temperature effect should be considered to perform reliable and accurate pressure measurement with minimum intrusiveness.

Paper Details

Date Published: 14 April 2011
PDF: 7 pages
Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79812X (14 April 2011); doi: 10.1117/12.880955
Show Author Affiliations
H. Bae, Univ. of Maryland, College Park (United States)
M. Yu, Univ. of Maryland, College Park (United States)

Published in SPIE Proceedings Vol. 7981:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011
Masayoshi Tomizuka, Editor(s)

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