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Proceedings Paper

A compact micromachined interferometric accelerometer based on diffraction grating
Author(s): Shuangshuang Zhao; Qiaofen Zhou; Changlun Hou; Jian Bai; Guoguang Yang
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Paper Abstract

In this paper, a MOEMS accelerometer with integrated-grating-based optical interference detection is presented. The acceleration sensor consists of an integrated grating on a transparent substrate and a mechanical part of a bulk silicon proof mass suspended by cantilevers attached to the silicon support substrate. The proof mass and cantilevers were fabricated with a two-mask process on one silicon-on-insulator (SOI) wafer. A phase sensitive diffractive grating was formed with the grating and the upper surface of the proof mass, which acts as a reflective mirror. Illuminating the grating with coherent light generates a series of diffracted optical beams, whose angles remain fixed, but whose intensities are modulated by the relative distance between the grating and the proof mass. Distance alteration caused by vibratory accelerations, changed the intensities of the diffracted beams, which could be detected by a differential circuit to get the variety of acceleration. Experimental results demonstrated that this MOEMS accelerometer has good performance with sensitivity of 3.63x104V/g and a dynamic range of ±5g.

Paper Details

Date Published: 9 November 2010
PDF: 8 pages
Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 78531Y (9 November 2010); doi: 10.1117/12.869399
Show Author Affiliations
Shuangshuang Zhao, Zhejiang Univ. (China)
Qiaofen Zhou, Zhejiang Univ. (China)
Changlun Hou, Zhejiang Univ. (China)
Jian Bai, Zhejiang Univ. (China)
Guoguang Yang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 7853:
Advanced Sensor Systems and Applications IV
Brian Culshaw; Yanbiao Liao; Anbo Wang; Xiaoyi Bao; Xudong Fan; Lin Zhang, Editor(s)

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