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Proceedings Paper

Micro-retroreflector array fabricated by the LIGA process
Author(s): Jürgen Jahns; Thomas Seiler; Jürgen Mohr D.D.S.; Martin Börner
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Paper Abstract

We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 micrometers. The array was fabricated by X-ray lithography and the LIGA process in a 1 mm thick PMMA layer and subsequently covered with Au. The area of the array is 1 mm x 10 mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to use it for the implementation of a transversal filter for femto-second pulses.

Paper Details

Date Published: 14 May 2010
PDF: 6 pages
Proc. SPIE 7716, Micro-Optics 2010, 77162H (14 May 2010); doi: 10.1117/12.854710
Show Author Affiliations
Jürgen Jahns, FernUniv. in Hagen (Germany)
Thomas Seiler, FernUniv. in Hagen (Germany)
Jürgen Mohr D.D.S., Karlsruhe Institute of Technology (Germany)
Martin Börner, Karlsruhe Institute of Technology (Germany)

Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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