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Proceedings Paper

Femtosecond laser fabrication of hybrid micro-optical elements and their integration on the fiber tip
Author(s): Mangirdas Malinauskas; Holger Gilbergs; Albertas Zukauskas; Kastytis Belazaras; Vytautas Purlys; Marius Rutkauskas; Gabija Bickauskaite; Andrej Momot; Domas Paipulas; Roaldas Gadonas; Saulius Juodkazis; Algis Piskarskas
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Paper Abstract

Femtosecond laser photo-polymerization of zirconium-silicon based sol-gel photopolymer SZ2080 is used to fabricate micro-optical elements with a single and hybrid optical functions. We demonstrate photo-polymerization of the solid immersion and Fresnel lenses. Gratings can be added onto the surface of lenses. The effective refractive index of polymerized structures can be controlled via the volume fraction of polymer. We used woodpile structure with volume fraction of 0.65-0.8. Tailoring of dispersion properties of micro-optical elements by changing filling ratio of polymer are discussed. Direct write approach is used to form such structures on a cover glass and on the tip of an optical fiber. Close matching of refractive indices between the polymer and substrate in visible and near infra red spectral regions (nSZ2080 = 1.504, nglass = 1.52) is favorable for such integration. The surface roughness of laser-polymerized resits was ~30 nm (min-max value), which is acceptable for optical applications in the visible range. For the bulk micro-optical elements the efficiency of 3D laser polymerization is increased by a factor ~ (2 - 4) × 102 times (depends on the design) by the shell-formation polymerization: (i) contour scanning for definition of shell-surface, (ii) development for removal of nonfunctional resist, and (iii) UV exposure for the final volumetric polymerization of an enclosed volume.

Paper Details

Date Published: 12 May 2010
PDF: 12 pages
Proc. SPIE 7716, Micro-Optics 2010, 77160A (12 May 2010); doi: 10.1117/12.854396
Show Author Affiliations
Mangirdas Malinauskas, Vilnius Univ. (Lithuania)
Holger Gilbergs, Stuttgart Univ. (Germany)
Albertas Zukauskas, Vilnius Univ. (Lithuania)
Kastytis Belazaras, Vilnius Univ. (Lithuania)
Vytautas Purlys, Vilnius Univ. (Lithuania)
Marius Rutkauskas, Vilnius Univ. (Lithuania)
Gabija Bickauskaite, Vilnius Univ. (Lithuania)
Andrej Momot, Vilnius Univ. (Lithuania)
Domas Paipulas, Vilnius Univ. (Lithuania)
Roaldas Gadonas, Vilnius Univ. (Lithuania)
Saulius Juodkazis, Swinburne Univ. of Technology (Australia)
Algis Piskarskas, Vilnius Univ. (Lithuania)

Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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