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Proceedings Paper

Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS
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Paper Abstract

We present the application of glass microlenses for the fabrication of inspection systems based on interferometric measurements. The microlenses are molded from wet etched silicon by using microfabrication techniques. The concerned system requires lenses to be used in a Mirau interferometer configuration. The principle of the system is presented, as well as different choices of lenses to be integrated. The use of glass microlenses monolithically molded on a substrate is proven as the proper technology to be used in the system.

Paper Details

Date Published: 13 May 2010
PDF: 8 pages
Proc. SPIE 7716, Micro-Optics 2010, 771621 (13 May 2010); doi: 10.1117/12.853907
Show Author Affiliations
Jorge Albero, Univ. de Franche-Comté (France)
Sylwester Bargiel, Univ. de Franche-Comté (France)
Christophe Gorecki, Univ. de Franche-Comté (France)
Kay Gastinger, SINTEF (Norway)

Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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