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Proceedings Paper

On comparing conventional and electrically driven OPC techniques
Author(s): Dominic Reinhard; Puneet Gupta
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Paper Abstract

This paper compares the range of accepted layouts produced by conventional Shape Driven Proximity Correction (SDOPC) and Electrically Driven Optical Proximity Correction (EDOPC). For SDOPC, correction is made until a target geometry matches a layout. In EDOPC, current matching is the primary objective.1-6 Using electrical objectives results in a smaller fragmentation requirement for an equivalent current accuracy as SDOPC. Number of candidate OPC solutions accepted by EDOPC is orders of magnitude higher than SDOPC leading to potentially much faster convergence. Moreover, due to additional flexibility in EDOPC, it is able to correct several layouts which are not correctable by SDOPC with the same fragmentation.

Paper Details

Date Published: 23 September 2009
PDF: 8 pages
Proc. SPIE 7488, Photomask Technology 2009, 748838 (23 September 2009); doi: 10.1117/12.833502
Show Author Affiliations
Dominic Reinhard, Univ. of California, Los Angeles (United States)
Puneet Gupta, Univ. of California, Los Angeles (United States)

Published in SPIE Proceedings Vol. 7488:
Photomask Technology 2009
Larry S. Zurbrick; M. Warren Montgomery, Editor(s)

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