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Proceedings Paper

A non-destructive metrology solution for detailed measurements of imprint templates and media
Author(s): Jeffrey Roberts; Linlin Hu; Torbjörn Eriksson; Kristian Thulin; Babak Heidari
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Paper Abstract

This study investigates a non-destructive optical metrology technique, that furnishes measurement solutions for hard drive discrete track recording (DTR) and bit patterned media (BPM) templates and imprints. From the measurement and analysis of polarized reflectance and transmittance, feature height and profile of DTR and BPM templates and imprints, as well as residual layer thickness of imprints, are accurately determined, and uniformity maps of these parameters are produced in a fraction of a minute. Simulations of theoretical polarized reflectance and transmittance, relating to next generation structures, demonstrate that the optical metrology solution has capability for future products.

Paper Details

Date Published: 29 September 2009
PDF: 13 pages
Proc. SPIE 7488, Photomask Technology 2009, 74881Z (29 September 2009); doi: 10.1117/12.833465
Show Author Affiliations
Jeffrey Roberts, n&k Technology, Inc. (United States)
Linlin Hu, n&k Technology, Inc. (United States)
Torbjörn Eriksson, Obducat Technologies AB (Sweden)
Kristian Thulin, Obducat Technologies AB (Sweden)
Babak Heidari, Obducat AB (Sweden)

Published in SPIE Proceedings Vol. 7488:
Photomask Technology 2009
Larry S. Zurbrick; M. Warren Montgomery, Editor(s)

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