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Proceedings Paper

Parallel processing for pitch splitting decomposition
Author(s): Levi Barnes; Yong Li; David Wadkins; Steve Biederman; Alex Miloslavsky; Chris Cork
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Paper Abstract

Decomposition of an input pattern in preparation for a double patterning process is an inherently global problem in which the influence of a local decomposition decision can be felt across an entire pattern. In spite of this, a large portion of the work can be massively distributed. Here, we discuss the advantages of geometric distribution for polygon operations with limited range of influence. Further, we have found that even the naturally global "coloring" step can, in large part, be handled in a geometrically local manner. In some practical cases, up to 70% of the work can be distributed geometrically. We also describe the methods for partitioning the problem into local pieces and present scaling data up to 100 CPUs. These techniques reduce DPT decomposition runtime by orders of magnitude.

Paper Details

Date Published: 30 September 2009
PDF: 11 pages
Proc. SPIE 7488, Photomask Technology 2009, 74882L (30 September 2009); doi: 10.1117/12.831396
Show Author Affiliations
Levi Barnes, Synopsys, Inc. (United States)
Yong Li, Synopsys, Inc. (United States)
David Wadkins, Synopsys, Inc. (United States)
Steve Biederman, Synopsys, Inc. (United States)
Alex Miloslavsky, Synopsys, Inc. (United States)
Chris Cork, Synopsys, Inc. (United States)

Published in SPIE Proceedings Vol. 7488:
Photomask Technology 2009
Larry S. Zurbrick; M. Warren Montgomery, Editor(s)

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