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Proceedings Paper

Angle alignment method for soft x-ray using double-periodic multilayer
Author(s): Baozhong Mu; Li Jiang; Shengzhen Yi; Jingtao Zhu; Xin Wang; Qiushi Huang; Moyan Tan; Xiaoqiang Wang; Jing Xu; Youwei Yao; Yi Huang; Hongying Liu; Zhanshan Wang; Lingyan Chen
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Paper Abstract

A double-periodic multilayer method was proposed to test KBA system of 4.75keV using 8keV source. Alignment of angle is the key for most of grazing incidence systems in x-ray range. But for soft x-ray, strong absorption makes the alignment have to be operated in vacuum, which is difficult enough. A double-periodic multilayer was used to experiment at 8keV in air replacing 4.75keV in vacuum. This multilayer includes two parts, the top and the bottom. The top is W/B4C multilayer with four bilayers and 6.93nm periods. The bottom is W/B4C multilayer with 10 bilayers and 3.95nm periods. For 8keV energy, x-ray will penetrate through the top and reflected by the bottom. While for 4.75keV, x-ray will be reflected by the top directly. The full width of half maximum is 0.1° at 8keV and 0.3° at 4.75keV, so it is accurate enough for 4.75keV to experiment at 8keV, which was also verified by the 1-D KBA experiment. This double-periodic multilayer provides a valid solution for alignment in soft x-ray range.

Paper Details

Date Published: 30 April 2009
PDF: 6 pages
Proc. SPIE 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, 73600M (30 April 2009); doi: 10.1117/12.820554
Show Author Affiliations
Baozhong Mu, Tongji Univ. (China)
Li Jiang, Tongji Univ. (China)
Shengzhen Yi, Tongji Univ. (China)
Jingtao Zhu, Tongji Univ. (China)
Xin Wang, Tongji Univ. (China)
Qiushi Huang, Tongji Univ. (China)
Moyan Tan, Tongji Univ. (China)
Xiaoqiang Wang, Tongji Univ. (China)
Jing Xu, Tongji Univ. (China)
Youwei Yao, Tongji Univ. (China)
Yi Huang, Tongji Univ. (China)
Hongying Liu, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)
Lingyan Chen, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 7360:
EUV and X-Ray Optics: Synergy between Laboratory and Space
René Hudec; Ladislav Pina, Editor(s)

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