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Proceedings Paper

Mechanisms of formation of nanostructures with atomic force microscopy
Author(s): H. Lee; L. Peng; K. Wang; M. K. Yapici; J. Zou; H. Liang
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Paper Abstract

The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.

Paper Details

Date Published: 27 December 2007
PDF: 8 pages
Proc. SPIE 6799, BioMEMS and Nanotechnology III, 67990D (27 December 2007); doi: 10.1117/12.760121
Show Author Affiliations
H. Lee, Texas A&M Univ. (United States)
L. Peng, Texas A&M Univ. (United States)
K. Wang, Texas A&M Univ. (United States)
M. K. Yapici, Texas A&M Univ. (United States)
J. Zou, Texas A&M Univ. (United States)
H. Liang, Texas A&M Univ. (United States)

Published in SPIE Proceedings Vol. 6799:
BioMEMS and Nanotechnology III
Dan V. Nicolau; Derek Abbott; Kourosh Kalantar-Zadeh; Tiziana Di Matteo; Sergey M. Bezrukov, Editor(s)

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