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Proceedings Paper

Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate
Author(s): Ji Jang; Changqing Xie; Xiping Xu; Xiaoli Zhu; Ming Liu
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Paper Abstract

In this paper, we calculated the numeric results of diffraction field in space of X-ray (λ=4.5nm) Fresnel zone plate based on angular spectrum method, analyzed the axial and radial distribution patterns of X-ray Fresnel zone plate. The Full Width at Half-Maximum (FWHM), Depth Of Focus (DOF) and Strehl efficiency of focus spot were studied. Discussed the relationships between FPZ's design parameter and focus spot properties. At the condition of λ=4.5nm and the outmost width Wn=50nm, the size of focus spot is proportional to the outmost width, and increase slowly with the increase of number of zones and focus length; the DOF of focus spot increase at first; when the focus length increased to 40µm, the DOF incline to a constant; the focus spot's Strehl efficiency increased slowly with the increase of number of zones and focus length.

Paper Details

Date Published: 15 January 2008
PDF: 9 pages
Proc. SPIE 6832, Holography and Diffractive Optics III, 68321S (15 January 2008); doi: 10.1117/12.755092
Show Author Affiliations
Ji Jang, Institute of Microelectronics (China)
Changchun Univ. of Science and Technology (China)
Changqing Xie, Institute of Microelectronics (China)
Xiping Xu, Changchun Univ. of Science and Technology (China)
Xiaoli Zhu, Institute of Microelectronics (China)
Ming Liu, Changchun Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 6832:
Holography and Diffractive Optics III
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu, Editor(s)

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